ZMI-4004|Interferometer measuring plate
Number of measuring axes: 4 axes.
Plate type: 6U VME64x.
Minimum optical power: 1.0μW.
Position resolution: 0.15 nm.
Maximum speed: ± 2.55m /s.
Accuracy (σ) at maximum speed: 0.2 nm.
Loop error compensation: Supported.
Compatible lasers: 7702, 7714 and 7724.
ZMI-4004 interferometer measuring plate is applied
ZMI-4004 is widely used in the following fields:
Semiconductor manufacturing: For wafer alignment and lithography systems.
Precision machining: high precision positioning and measurement.
Aerospace: High-precision assembly and inspection.
Scientific research: nanoscale displacement measurement.
advantage
High precision measurement: Provides sub-nanometer resolution to meet the most demanding measurement needs.
Flexible system expansion: Support multi-axis measurement, scalability.
High reliability: Advanced error compensation technology is adopted to ensure the accuracy of measurement.
| Other models recommended |
| IC697VDD100 |
| IC698CPE010-JU |
| IC698PSA100E |
| IC698PSA100D |
| 9771-210 |
| D201463 |
| S-053M 3BHB012897R0003 |
| D201505 |
| ZMI-4004 |
| IC660EPM100J |
