0190-51546REV03 is a thermionic/Pirani gauge from Aibuy Applied Materials for vacuum chamber pressure measurement applications. Here is a breakdown of its main features and functions:
Features:
Measure the pressure in the vacuum chamber.
There are two main methods for pressure measurement:
Thermionic meter: This method works by ionizing gas molecules in a chamber and measuring the resulting ionic current. It is effective for measuring high vacuums (10^-4 to 10^-10 Torr).
Pirani gauge: This method measures the thermal conductivity of the gas in the chamber. It is suitable for measuring coarse vacuum (atmospheric pressure up to 10^-4 Torr)
Applications:
Semiconductor Manufacturing: Thermionic/Pirani vacuum gauges are critical for monitoring and controlling chamber pressure during various film deposition processes.
Vacuum coating: In vacuum coating applications, maintaining precise pressure levels is critical to achieving the desired coating performance.
Research and Development: These vacuum gauges are an invaluable tool for studying vacuum environments.
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